Product Center

• DIO3 high efficiency cleaning system
• Water surface hydrophily tester
• Colour and defects detector and sorter
• Anti-LID equipment
• Anti-PID equipment

DIO3 high efficiency cleaning system

Equipment features：

· Cooling water module、gas module and Electric module modular design, maintenance friendly and safe;
· Gas module and wet module separated design, easy to use;
· PID automatic control of the DIO3 concentration;
· Multi-wet module expansion and control; 
· Ultra-high concentration generator, very high efficiency gas and liquid mixer;
· Running parameter stored and export;
· MES connection;